Research Article

Effect of the on/off Cycling Modulation Time Ratio of C 2 H 2 / S F 6 Flows on the Formation of Geometrically Controlled Carbon Coils

Figure 6

(a) FESEM images showing the surface morphology of sample F, (b) the magnified FESEM image for (a), and (c) the high-magnified FESEM image for (b).
908961.fig.006a
(a)
908961.fig.006b
(b)
908961.fig.006c
(c)