Effect of the on/off Cycling Modulation Time Ratio of C₂H₂/SF₆ Flows on the Formation of Geometrically Controlled Carbon Coils

Table 1

Experimental conditions for the deposition of carbon coils on the substrates for samples A, B, C, D, E, and F.

Processes	Samples	C2H2 flow rate (sccm)	H2 flow rate (sccm)	SF6 flow rate (sccm)	Total pressure (Torr)	Total deposition time (min)	Source gases flow time (min)			Substrate temp. (°C)
							C2H2	H2	SF6
I	A	15	35	—	100	90	90	90	—	750
II	B	15	35	35	100	90	89	90	1	750
III	C	15	35	35	100	90	84	90	6	750
IV	D	15	35	35	100	90	82	90	8	750
V	E	15	35	35	100	90	42	90	48	750
VI	F	15	35	35	100	90	90	90	90	750