Crystallinity Improvement of ZnO Thin Film on Different Buffer Layers Grown by MBE

Table 2

Peak position, FWHM, grain size, strain, stress, and lattice constants (d) of the samples from XRD measurements and derived lattice parameters (a, c).

Sample	2 theta (degree)	FWHM (acrsec)	Grain size (nm)	Strain (microstrain)	Stress (Gpa)	𝑑 (Å)	𝑎 (Å)	𝑐 (Å)
A	34.68	791.74	37.872	299.624	3.306	2.584	3.164	5.167
B	34.33	242.58	123.493	90.809	−1.171	2.609	3.196	5.218
C	34.37	64.18	466.849	24.057	−0.606	2.606	3.192	5.212
D	34.41	48.66	615.805	18.261	−0.120	2.603	3.188	5.206
E	34.33	98.01	305.715	36.692	−1.145	2.609	3.195	5.218