Research Article

Growth of Silver Nanoparticles by DC Magnetron Sputtering

Figure 3

AFM height images (250 nm × 250 nm) of Ag nanoparticles deposited on Si substrate at different target-substrate distances: (a) 10 cm, (b) 15 cm, and (c) 20 cm. (d) is AFM height image of bare Si substrate.
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(a)
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(b)
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(c)
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(d)