963609.fig.006
Figure 6: Schematic of thin-film growth based on DC sputtering technique (adapted from [31]). The processes include (a) migration of single atoms on substrate, (b) aggregation of single atoms, (c) nucleation to form nanoparticles, (d) growth of nanoparticles, (e) coalescence of nanoparticles, and (f) formation of continuous film.