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Journal of Nanomaterials
Volume 2012 (2012), Article ID 984048, 9 pages
http://dx.doi.org/10.1155/2012/984048
Review Article

Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC

1State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
2Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

Received 3 October 2012; Accepted 11 December 2012

Academic Editor: Yongsheng Li

Copyright © 2012 Fang Jiang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [1 citation]

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  • Tomas Strasak, Filip Novotny, Radek Fajgar, and Zdenek Bastl, “RIR MAPLE procedure for deposition of carbon rich Si/C/H films,” Applied Surface Science, vol. 292, pp. 413–419, 2014. View at Publisher ยท View at Google Scholar