Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC

Table 1

Different preparation methods and properties of silicon carbide.

Materials	Density (g/cm^3)	Free state of Si	Isotropic	Cost	Preparation cycle	Surface modification
HP-SiC	3.20	No	Bad	High	Short term	Requirement
RB-SiC	3.04	Yes	Good	Low	Short term	Requirement
S-SiC	3.10	No	Worse	Lower	Long term	Requirement
CVD-SiC	3.21	No	Best	High	Long term	Nonrequirement