| | Materials | Density (g/cm3) | Free state of Si | Isotropic | Cost | Preparation cycle | Surface modification |
| | HP-SiC | 3.20 | No | Bad | High | Short term | Requirement | | RB-SiC | 3.04 | Yes | Good | Low | Short term | Requirement | | S-SiC | 3.10 | No | Worse | Lower | Long term | Requirement | | CVD-SiC | 3.21 | No | Best | High | Long term | Nonrequirement |
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