Table 1: Annealing conditions of monolayer graphene M1 and M2.

Annealing no.Sample
M1M2

1300°C, 5 mbar, 2 hours300°C, 50mbar, 2 hours
N2/H2 (200 sccm/50 sccm)

2400°C, 5 mbar, 2 hours400°C, 50 mbar, 2 hours
N2/H2 (200 sccm/50 sccm)

3400°C, 50 mbar, 2 hours
N2/H2 (200 sccm/50 sccm)