3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles

Table 1

Proposed reaction, classification, activation energy, and preexponential factor considered in the model.

Proposed reaction	Classification	Activation energy; (kJ/mol)	Preexponential factor; (1/s)
(1) Ti(OC4H9)4 → TiO2(g) + 4C4H8 + 2H2O	Volumetric decomposition	70.5	3.96 × 10^5
(2) Ti(OC4H9)4 + 2H2O → TiO2(g) + 4C4H9OH	Volumetric hydrolysis	8.43	3.0 × 10^15
(3) Ti(OC4H9)4 → TiO2(s) + 4C4H8 + 2H2O	Surface deposition by TBOT	126.01	1.0 × 10^9
(4) TiO2(g) → TiO2(s)	Surface deposition by TiO2	126.01	1.0 × 10^9