A Kind of Coating Method of GaN-MOCVD Graphite Susceptor

Table 1

Geometric parameters of reactor model.

Description/units	Symbol	Value
Reactor outer radius/cm	𝑅𝑅	11.1
Reactor inner radius/cm	𝑟𝑅	95.3
Reactor outer height/cm	𝐻𝐿	12.7
Reactor inner height/cm	ℎ𝐿	76.2
Graphite susceptor radius/cm	𝑅𝑆	63.5
Graphite susceptor thickness/cm	𝐻𝑆	12.7
Heater thickness/cm	𝐻𝐻	5.08
Heater radius/cm	𝑅𝐻	15.24
Susceptor upper surface from reactor inner face/cm	𝐷	2.54
Heater top surface from susceptor lower surface/cm	𝑑	5.08
Substrate thickness/cm	ℎ𝑠	0.05
Substrate radius/cm	𝑟𝑆	50.8