Table 1: Geometric parameters of reactor model.

Description/unitsSymbolValue

Reactor outer radius/cm 11.1
Reactor inner radius/cm 95.3
Reactor outer height/cm 12.7
Reactor inner height/cm 76.2
Graphite susceptor radius/cm 63.5
Graphite susceptor thickness/cm 12.7
Heater thickness/cm 5.08
Heater radius/cm 15.24
Susceptor upper surface from reactor inner face/cm 2.54
Heater top surface from susceptor lower surface/cm 5.08
Substrate thickness/cm 0.05
Substrate radius/cm 50.8