154179.fig.001a
(a)
154179.fig.001b
(b)
154179.fig.001c
(c)
Figure 1: XRD results for Ta films at three conditions. (a) Deposited at RT only, (b) postannealing at = 150°C for 1 h, and (c) postannealing at = 250°C for 1 h.