Journals
Publish with us
Publishing partnerships
About us
Blog
Journal of Nanomaterials
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Journal of Nanomaterials
/
2013
/
Article
/
Fig 7
/
Research Article
The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films
Figure 7
Frequency responses of TFBAR devices with (a) 15°-tilted and (b) 23°-tilted AlN layers.
(a)
(b)