Aligned Carbon Nanotubes Array by DC Glow Plasma Etching for Supercapacitor

Figure 4

TEM images after etching by DC glow plasma, (a) by oxygen plasma, (b) by argon plasma, (c) low magnification by oxygen-argon plasma, and (d) high magnification by oxygen-argon plasma.

(a)

(b)

(c)

(d)