One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers
Figure 5
Energy dispersive spectrometry (EDS) analysis of the nanostructured surface fabricated by a sacrificial layer. (a) SEM image of the patterned hierarchical structure. (b) Magnified image of the high-density nanostructure on a micropatterned architecture in the early etching state. (c) EDS spectrum of the PR residue on the cocktail-glass-shaped nanostructures.
