Table 2: Experimental conditions for the deposition of carbon coils.

SamplesC2H2  flow rate (sccm)H2 flow rate (sccm)SF6 flow rate (sccm)Total pressure (Torr)Total deposition time (min)C2H2 injection time (min)H2 injection time (min)SF6 injection time (min)Substrate temperature (°C)

A~F1535351009090905750