383867.fig.003a
(a)
383867.fig.003b
(b)
383867.fig.003c
(c)
383867.fig.003d
(d)
383867.fig.003e
(e)
383867.fig.003f
(f)
Figure 3: The line scan profiles of the Si film with different thickness. The (a) and (b) were the profiles of the line scan marked in Figure 2(a), the (c) and (d) were the profiles of the line scan marked in Figure 2(c), and the (e) and (f) were the profiles of the line scan marked in Figure 2(e).