393724.fig.001a
(a)
393724.fig.001b
(b)
393724.fig.001c
(c)
393724.fig.001d
(d)
393724.fig.001e
(e)
Figure 1: Change of Cu morphology upon electropolishing: (a)–(c) AFM images for 5 min (a), 10 mins (b), 40 mins (c) electropolishing, (d) waviness versus electropolishing time, and (e) particle density versus electropolishing time.