Research Article
The Effect of Nitrogen Ion Implantation on the Surface Properties of Ti6Al4V Alloy Coated by a Carbon Nanolayer
Table 2
Operating parameters of the surface modifications by IBAD.
| | Parameter | Values |
| | Electron beam deposition of carbon nanolayers | | | Base pressure (Pa) | | | Work pressure (Pa) | | | Acceleration voltage (kV) | 6 | | Emission current (mA) | 100 | | Target | Graphite (99.999%) | | Deposition rate (nm·s−1) | 0.15 | | Nitrogen ion implantation | | | Base pressure (Pa) | | | Work pressure (Pa) | | | Acceleration voltage (kV) | 90 | | Ion beam current density (A·cm−2) | 1.5 |
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