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Journal of Nanomaterials
Volume 2013 (2013), Article ID 502382, 6 pages
http://dx.doi.org/10.1155/2013/502382
Research Article

Influence of Annealing Temperature on the Characteristics of Ti-Codoped GZO Thin Solid Film

Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan

Received 6 May 2013; Accepted 29 June 2013

Academic Editor: Sheng-Rui Jian

Copyright © 2013 Tao-Hsing Chen and Tzu-Yu Liao. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. S.-J. Park, T.-Y. Park, Y.-S. Choi et al., “Enhanced optical power and low forward voltage of GaN-based light-emitting diodes with Ga-doped ZnO transparent conducting layer,” Applied Physics Letters, vol. 96, no. 5, Article ID 051124, 2010. View at Publisher · View at Google Scholar · View at Scopus
  2. M. K. Puchert, A. Hartmann, R. N. Lamb, and J. W. Martin, “Highly resistive sputtered ZnO films implanted with copper,” Journal of Materials Research, vol. 11, no. 10, pp. 2463–2469, 1996. View at Scopus
  3. S. Kobayakawa, Y. Tanaka, and A. Ide-Ektessabi, “Characteristics of Al doped zinc oxide (ZAO) thin films deposited by RF magnetron sputtering,” Nuclear Instruments and Methods in Physics Research B, vol. 249, no. 1-2, pp. 536–539, 2006. View at Publisher · View at Google Scholar · View at Scopus
  4. M. L. Addonizio and C. Diletto, “Doping influence on intrinsic stress and carrier mobility of LP-MOCVD-deposited ZnO:B thin films,” Solar Energy Materials and Solar Cells, vol. 92, no. 11, pp. 1488–1494, 2008. View at Publisher · View at Google Scholar · View at Scopus
  5. J. J. Berry, D. S. Ginley, and P. E. Burrows, “Organic light emitting diodes using a Ga:ZnO anode,” Applied Physics Letters, vol. 92, no. 19, Article ID 193304, 2008. View at Publisher · View at Google Scholar · View at Scopus
  6. Y. G. Wanga, S. P. Laua, X. H. Zhangb et al., “Enhancement of near-band-edge photoluminescence from ZnO films by face-to-face annealing,” Journal of Crystal Growth, vol. 259, pp. 335–342, 2003.
  7. H. Sheng, N. W. Emanetoglu, S. Muthukumar, B. V. Yakshinskiy, S. Feng, and Y. Lu, “Ta/Au ohmic contacts to n-type ZnO,” Journal of Electronic Materials, vol. 32, no. 9, pp. 935–938, 2003. View at Scopus
  8. Y. R. Ryu, S. Zhu, D. C. Look, J. M. Wrobel, H. M. Jeong, and H. W. White, “Synthesis of p-type ZnO films,” Journal of Crystal Growth, vol. 216, no. 1, pp. 330–334, 2000. View at Publisher · View at Google Scholar · View at Scopus
  9. H.-K. Kim, K.-K. Kim, S.-J. Park, T.-Y. Seong, and I. Adesida, “Formation of low resistance nonalloyed Al/Pt ohmic contacts on n-type ZnO epitaxial layer,” Journal of Applied Physics, vol. 94, no. 6, pp. 4225–4227, 2003. View at Publisher · View at Google Scholar · View at Scopus
  10. J.-Y. Tseng, Y.-T. Chen, M.-Y. Yang et al., “Deposition of low-resistivity gallium-doped zinc oxide films by low-temperature radio-frequency magnetron sputtering,” Thin Solid Films, vol. 517, no. 23, pp. 6310–6314, 2009. View at Publisher · View at Google Scholar · View at Scopus
  11. C. Guillén and J. Herrero, “High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering,” Thin Solid Films, vol. 515, no. 2, pp. 640–643, 2006. View at Publisher · View at Google Scholar · View at Scopus
  12. G. K. Paul and S. K. Sen, “Sol-gel preparation, characterization and studies on electrical and thermoelectrical properties of gallium doped zinc oxide films,” Materials Letters, vol. 57, no. 3, pp. 742–746, 2002. View at Publisher · View at Google Scholar · View at Scopus
  13. C.-F. Yu, S.-H. Chen, S.-J. Sun, and H. Chou, “Influence of the grain boundary barrier height on the electrical properties of Gallium doped ZnO thin films,” Applied Surface Science, vol. 257, no. 15, pp. 6498–6502, 2011. View at Publisher · View at Google Scholar · View at Scopus
  14. K. H. Yoon and J. Y. Cho, “Photoluminescence characteristics of zinc oxide thin films prepared by spray pyrolysis technique,” Materials Research Bulletin, vol. 35, no. 1, pp. 39–46, 2000. View at Publisher · View at Google Scholar · View at Scopus
  15. J. Ye, S. Gu, S. Zhu et al., “The growth and annealing of single crystalline ZnO films by low-pressure MOCVD,” Journal of Crystal Growth, vol. 243, no. 1, pp. 151–156, 2002. View at Publisher · View at Google Scholar · View at Scopus
  16. Q. P. Wang, D. H. Zhang, Z. Y. Xue, and X. J. Zhang, “Mechanisms of green emission from ZnO films prepared by rf magnetron sputtering,” Optical Materials, vol. 26, no. 1, pp. 23–26, 2004. View at Publisher · View at Google Scholar · View at Scopus
  17. S. H. Bae, S. Y. Lee, H. Y. Kim, and S. Im, “Effects of post-annealing treatment on the light emission properties of ZnO thin films on Si,” Optical Materials, vol. 17, no. 1-2, pp. 327–330, 2001. View at Publisher · View at Google Scholar · View at Scopus
  18. Y. G. Wang, S. P. Lau, X. H. Zhang et al., “Evolution of visible luminescence in ZnO by thermal oxidation of zinc films,” Chemical Physics Letters, vol. 375, no. 1-2, pp. 113–118, 2003. View at Publisher · View at Google Scholar · View at Scopus
  19. K. Sakurai, M. Kanehiro, K. Nakahara, T. T. Tetsuhiro Tanabe, S. Fujita, and S. Fujita, “Effects of oxygen plasma condition on MBE growth of ZnO,” Journal of Crystal Growth, vol. 209, no. 2-3, pp. 522–525, 2000. View at Publisher · View at Google Scholar · View at Scopus
  20. D. G. Baik and S. M. Cho, “Application of sol-gel derived films for ZnO/n-Si junction solar cells,” Thin Solid Films, vol. 354, no. 1, pp. 227–231, 1999. View at Publisher · View at Google Scholar · View at Scopus
  21. S. R. Jian, G. J. Chen, S. K. Wang et al., “Rapid thermal annealing effects on the structural and nanomechanical properties of Ga-doped ZnO thin films,” Surface and Coatings Technology, 2012. View at Publisher · View at Google Scholar
  22. X. Yu, J. Ma, F. Ji et al., “Preparation and properties of ZnO:Ga films prepared by r.f. magnetron sputtering at low temperature,” Applied Surface Science, vol. 239, no. 2, pp. 222–226, 2005. View at Publisher · View at Google Scholar · View at Scopus
  23. Z.-Z. Li, Z.-Z. Chen, W. Huang, S.-H. Chang, and X.-M. Ma, “The transparence comparison of Ga- and Al-doped ZnO thin films,” Applied Surface Science, vol. 257, no. 20, pp. 8486–8489, 2011. View at Publisher · View at Google Scholar · View at Scopus
  24. J. Schiøtz, T. Vegge, F. D. Di Tolla, and K. W. Jacobsen, “Atomic-scale simulations of the mechanical deformation of nanocrystalline metals,” Physical Review B, vol. 60, no. 17, pp. 11971–11983, 1999. View at Scopus
  25. G. Wang and X. Li, “Size dependency of the elastic modulus of ZnO nanowires: surface stress effect,” Applied Physics Letters, vol. 91, no. 23, Article ID 231912, 2007. View at Publisher · View at Google Scholar · View at Scopus