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Journal of Nanomaterials
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Journal of Nanomaterials
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2013
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Article
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Fig 1
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Research Article
Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems
Figure 1
W concentration (a), growth rate and thickness (b) of the films as a function of sputtering current.
(a)
(b)