Fabrication of Silicon Nitride Ion Sensitive Field-Effect Transistor for pH Measurement and DNA Immobilization/Hybridization

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</svg> measurement of ISFET for pH 2, 3, 7, 8, and 9.</table>

Journal of Nanomaterials

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Figure 9

Figure 9: Fabrication of Silicon Nitride Ion Sensitive Field-Effect Transistor for pH Measurement and DNA Immobilization/Hybridization 