Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays

Table 1

Comparison of grating geometrical parameters obtained by AFM and scatterometry, together with nominal ones (intended by the manufacturer). All the dimensions are in nanometers.

Parameter	Nominal	AFM	Scaled AFM	Scatterometry
Period	1000	1091.5	1000⋆	1000⋆⋆
Linewidth	500	359.4	329.3	307.2⋆⋆⋆
NiFe thickness	32	—	—	—
Relief depth	16	21.7	21.7	24.3⋆⋆⋆

⋆Fixed value.
⋆⋆Just verified from the position of the Wood anomaly.
⋆⋆⋆The average error of the fit on Poincaré sphere is 𝜀=3.8^∘.