Review Article
Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays
Table 1
Comparison of grating geometrical parameters obtained by AFM and scatterometry, together with nominal ones (intended by the manufacturer). All the dimensions are in nanometers.
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Fixed value. Just verified from the position of the Wood anomaly. The average error of the fit on Poincaré sphere is . |