Table 1: Comparison of grating geometrical parameters obtained by AFM and scatterometry, together with nominal ones (intended by the manufacturer). All the dimensions are in nanometers.

Parameter Nominal AFM Scaled AFM Scatterometry

Period 1000 1091.5 1000 1000
Linewidth 500 359.4 329.3 307.2
NiFe thickness 32
Relief depth 16 21.7 21.7 24.3

Fixed value.
Just verified from the position of the Wood anomaly.
The average error of the fit on Poincaré sphere is .