Anomalous Threshold Voltage Variability of Nitride Based Charge Storage Nonvolatile Memory Devices

Figure 8

Arrhenius plots for samples of each technology node, that is, (a) 110 nm, (b) 90 nm, (c) 65 nm.

(a) 110  nm LCT NVM

(b) 90 nm LCT NVM

(c) 65 nm LCT NVM