SILAR-Based Application of Various Nanopillars on GaN-Based LED to Enhance Light-Extraction Efficiency
Figure 3
SEM images of the surface: (a) flat surface: LED I and LED II without nanopatterns, (b) LED III with SiO2 nanopillars, (c) LED IV with SiO2/ITO, SiO2/p-GaN, and SiO2/n-GaN nanopillars, and (d) LED V with ITO, p-GaN, and n-GaN nanopillars by removing SiO2.
