Research Article
Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process
Table 1
The parameters of RIE.
| No. | Pressure (mTorr) |
O2 (sccm) | Time (minutes) | Diameter (μm) | Height (μm) | Aspect ratio |
| 1 | 25 | 10 | 10 | 36.58 | 16.81 | 0.45 | 2 | 25 | 5 | 10 | 31.76 | 21.83 | 0.68 | 3 | 25 | 1 | 10 | 30.83 | 22.57 | 0.73 | 4 | 25 | 0 | 10 | 30.65 | 22.80 | 0.74 |
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