Research Article
Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography
Table 1
Details of synthesised polymer characteristics used for the present work.
| | Molecular weight, , g/mol | Polydispersity, / | Molecular weight of PS, , g/mol | Volume fraction of PS, | Description |
| | 50000 | 1.03 | 17000 | 0.64 | PS-b-PDMS | | 11000 | 1.05 | — | — | PS-OH |
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