Table 1: The lattice and dimension of the nanopatterns fabricated on the ITO layer by an electron beam lithography.

NanopatternsLatticePattern shape pitch (nm) pitch (nm)Pattern dimension (nm)

ST SquareTriangle400400304
SSSquare400400200
SCCircle400400226

HT HexagonalTriangle400693283
HSSquare400693186
HCCircle400693210