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Journal of Nanomaterials
Volume 2013 (2013), Article ID 851489, 6 pages
http://dx.doi.org/10.1155/2013/851489
Review Article

Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate

1Department of Physics, Faculty of Science, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand
2Division of Material Science, Faculty of Science, Maejo University, Chiang Mai 50290, Thailand
3Western Digital (Thailand) Company Limited, Ayutthaya 13160, Thailand

Received 25 February 2013; Accepted 28 May 2013

Academic Editor: Shafiul Chowdhury

Copyright © 2013 Alonggot Limcharoen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Alonggot Limcharoen, Pichet Limsuwan, Chupong Pakpum, and Krisda Siangchaew, “Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate,” Journal of Nanomaterials, vol. 2013, Article ID 851489, 6 pages, 2013. doi:10.1155/2013/851489