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Journal of Nanomaterials
Volume 2013 (2013), Article ID 851489, 6 pages
Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL2O3–TiC Substrate
1Department of Physics, Faculty of Science, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand
2Division of Material Science, Faculty of Science, Maejo University, Chiang Mai 50290, Thailand
3Western Digital (Thailand) Company Limited, Ayutthaya 13160, Thailand
Received 25 February 2013; Accepted 28 May 2013
Academic Editor: Shafiul Chowdhury
Copyright © 2013 Alonggot Limcharoen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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