All-Solution-Processed InGaO3(ZnO)m Thin Films with Layered Structure
Figure 4
XRD patterns of InGaZnO thin films (a)–(c) before and (d)–(f) after annealing on different buffer layers. (a) and (d) without ZnO buffer, (b) and (e) randomly oriented ZnO buffer layer, and (c) and (f) preferentially oriented ZnO buffer layer.