909786.fig.005a
(a)
909786.fig.005b
(b)
909786.fig.005c
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909786.fig.005d
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Figure 5: (a) Cross-sectional bright-field TEM image, (b) selective area diffraction pattern (SADP) and (c) HRTEM image obtained from InGaO3 thin film on ZnO buffer layer with strong c-axis preferred orientation. (d) Frequent phonon scattering at the surface of nano-grains as well as the interfaces of the InGaO3 superlattice.