Research Article
Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness
Table 3
Hardness values by microhardness tester.
| | Load | 25 gf | 100 gf | 200 gf | 300 gf | 500 gf | 1000 gf |
| | A (SS 304) | 6630 | 6061 | 4552 | 4102 | — | — | | B (SS 304) | 3891 | 3181 | 2153 | 1647 | | — | | C (AB) (SS 304) | 3690 | 3120 | 2850 | 2999 | 3514 | — | | D (BA) (SS 304) | 4077 | 4091 | 3066 | 3308 | 2875 | — | | E (ABA) (SS 304) | 5868 | 3713 | 3314 | 2960 | 2768 | 2514 | | A (Si 100) | 4077 | 4091 | 3066 | 3308 | 2875 | — | | E (ABA) (Si 100) | 3690 | 3120 | 2850 | 2999 | 3514 | — |
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