Study on the Microstructure and Electrical Properties of Boron and Sulfur Codoped Diamond Films Deposited Using Chemical Vapor Deposition

<table>SIMS depth profile of various elements of doped diamond thin films. The inset showed the concentration of sulfur of B-S codoped and S lone doped films.</table>

Journal of Nanomaterials

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Figure 4

Figure 4: Study on the Microstructure and Electrical Properties of Boron and Sulfur Codoped Diamond Films Deposited Using Chemical Vapor Deposition 