Review Article
An Overview on Structure and Field Emission Properties of Carbon Nitride Films
Table 4
Nitrogen content of the
films.
| | N content (at.%) | Preparation method | Turn-on electric field ()/threshold field () | Current density | Reference |
| a-C : N films | 8.0 | Electron cyclotron resonance plasma | — | — | [60] | ta-C : N | 10 | A pulsed filtered vacuum arc deposition | 4 V/m ( A/cm2) | — | [10] | DLC : N | 10 | Electrodeposition | 11.8 V/m (1 A/mm2) | 59.5 A/mm2 (24 V/m) | [61] | ta-C : N | 10.3 | Filtered cathodic vacuum arc deposition | — | — | [62] |
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