Simple, Fast, and Cost-Effective Fabrication of Wafer-Scale Nanohole Arrays on Silicon for Antireflection
Figure 3
SEM images of size reduced PS NCP beads and the Cr nanoholes. ((a)–(c)) SEM images of PS beads with average diameters of 235 nm, 215 nm, and 185 nm, respectively; ((e)-(f)) SEM images of Cr nanoholes with average diameters of 244 nm, 219 nm, and 191 nm, respectively.