Simple, Fast, and Cost-Effective Fabrication of Wafer-Scale Nanohole Arrays on Silicon for Antireflection
Figure 4
SEM and AFM images of Si-hole arrays. ((a)-(b)) The high and low magnification SEM images of Si-hole arrays after 3 min etching; (c) the 3D AFM images 3 min etched Si-hole arrays; (d) height profile of the red line marked in (c); ((e)-(f)) SEM images of Si-hole arrays after 5 min and 7 min etching, respectively.
