Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy

<table>Thermal desorption spectroscopy of the AZO films deposited at 200°C.</table>

Journal of Nanomaterials

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Figure 1

Figure 1: Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy 

Figure 1 | Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy 