Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy

Table 3

The average optical transmittance in visible wavelength region and the corresponding percent variation of the AZO films deposited at room temperature (RT), 100°C, and 200°C before and after measuring TDS.

Substrate temperature	Average optical transmittance (%)		Average optical transmittance’s percent variation (%)
	Before	After
RT	70	82	17
100°C	71	75	5.6
200°C	90	92	2.2