Catalyst-Free Vapor-Phase Method for Direct Integration of Gas Sensing Nanostructures with Polymeric Transducing Platforms

Figure 1

Photograph of the polymeric transducing platform prior to growing the sensing nanostructures (a) and schematic view (not at scale) of the main technological processing steps involved in the fabrication of an individual gas sensor: photolithography, deposition, and lift-off of the Pt heater (b), deposition of an interlevel-polymeric layer (c), photolithography, deposition, and lift-off of the Pt electrodes ((d) and (e)), and catalyst-free direct growth of sensing nanostructures via AACVD (f).