Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses

Figure 1

The XRR profiles of the a-C:H films deposited at various thicknesses: (a) 55 nm, (b) 101 nm, (c) 118 nm, and (d) 143 nm.

(a)

(b)

(c)

(d)