Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses

Figure 5

ERDA and RBS spectra of the a-C:H films prepared at various thicknesses: (a) 55 nm (A sample), (b) 101 nm (B sample), (c) 118 nm (C sample), and (d) 143 nm (D sample).

(a)

(b)

(c)

(d)