Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses

Table 1

Comparison of the peak positions of the C K-edge NEXAFS spectra of the a-C:H films obtained from previous works and from the present work.

Samples	Peak positions (eV)						Reference
	(C=C)	(C–H)	(C≡C)	(C–C)	(C=C)	(C≡C)
Previous works
a-C:H^†	285.5	288.0	—	—	293.0	303.8	[4]
a-C:H^††	285.0	~287.0	—	~288.0	—	—	[10]
a-C:H^†††	285.5	287.0–288.0	—	293.0	—	—	[19]
a-C:H^††††	284.7	286.3	287.2	288.2	292.6	303.8	[20]
Present work
A, B, C, D	284.6	286.6	~287.5	~288.8	293.0	300.2	—

Electron cyclotron resonance chemical vapor deposition (ECR-CVD) method, ^††plasma-enhanced chemical vapor deposition (PECVD) method, ^†††dip deposited method, and ^††††pulsed laser deposition (PLD) method.