Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Table 1

Parameters used for Ag/SiO₂ interface detection.

Milling area (μm × μm)	Dwell time (μs)	Current (nA)	Overlap	Ion flux (ions cm^−2 s^−1)
15 × 15	100	0.3	50%	8.32 × 10^14