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Journal of Nanomaterials
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Journal of Nanomaterials
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2015
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Article
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Fig 4
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Research Article
Investigation of In Situ Boron-Doping in SiGe Source/Drain Layer Growth for PMOS Devices
Figure 4
TEM image of the cross section of sample (a) #1 (
) and (b) #5 (
).
(a)
(b)