Finite Element Analysis and Simulation about Microgrinding of SiC

Table 3

Changes of load due to the depth and velocity.

Simple variable method, depth (nm)	Load (mN)	Average load (mN)	Simple variable method, velocity (mm/s)	Load (mN)	Average load (mN)
20	0.0457; 0.0450; 0.0458	0.0455	1	0.0480; 0.0486; 0.0476	0.0481
30	0.0465; 0.0462; 0.0462	0.0463	5	0.0477; 0.0473; 0.0466	0.0472
40	0.0469; 0.0491; 0.0483	0.0481	10	0.0477; 0.0476; 0.0472	0.0475
50	0.0492; 0.0495; 0.0489	0.0492	15	0.0468; 0.0476; 0.0478	0.0474