Research Article
Finite Element Analysis and Simulation about Microgrinding of SiC
Table 3
Changes of load due to the depth and velocity.
| Simple variable method, depth (nm) | Load (mN) | Average load (mN) | Simple variable method, velocity (mm/s) | Load (mN) | Average load (mN) |
| 20 | 0.0457 0.0450 0.0458 | 0.0455 | 1 | 0.0480 0.0486 0.0476 | 0.0481 |
| 30 | 0.0465 0.0462 0.0462 | 0.0463 | 5 | 0.0477 0.0473 0.0466 | 0.0472 |
| 40 | 0.0469 0.0491 0.0483 | 0.0481 | 10 | 0.0477 0.0476 0.0472 | 0.0475 |
| 50 | 0.0492 0.0495 0.0489 | 0.0492 | 15 | 0.0468 0.0476 0.0478 | 0.0474 |
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