Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates

<div>Schematic of the fabrication of LEDs with MS. (a) Epistructures, (b) MS coating, (c) dry etching, and (d) regrowth.</div>

Journal of Nanomaterials

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Figure 1

Figure 1: Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates 

Figure 1 | Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates 