Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates

<div>Top-view SEM images of dispersed MS structures on (a) center and (b) edge regions. (c) Tilt-view SEM image of microrod structures after ICP etching.</div>

Journal of Nanomaterials

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Figure 3

Figure 3: Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates 

Figure 3 | Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates 