Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures

<div>Dependence of the (a) resistivity, (b) Hall mobility, and (c) carrier concentration of TZO thin films on H<sub>2</sub>/(Ar + H<sub>2</sub>) flow ratio and substrate temperature.</div>

Journal of Nanomaterials

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Figure 1

Figure 1: Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 

Figure 1 | Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 