Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures

Figure 3

(a) XPS spectrum of the RT-deposited TZO thin film with = 0%, and the XPS spectra of O 1s for RT-deposited TZO thin films with (b) = 0% and (c) =10%.

(a)

(b) RT, 0%

(c) RT, 10%